辽宁省的关键专利：全面解读

随着电子、航天、军事和生物医药等工业的不断发展，现代工业产品和现代科学实验活动要求微型化、精密化、高纯度、高质量和高可靠性，要求半导体元器件在相当高的洁净度环境下加工。

用于半导体器件搬运的小型机器人，必须能够适应高洁净度且空间狭小的使用环境，同时满足结构简单紧凑、刚度高，运动灵活可靠，重复定位精度高和可靠性高的要求。

为了提高工作效率，通常将两组机械手臂安装在同一回转平台上，当一组手臂取片之后，另一组手臂可以放片。目前国内外最常见的用于洁净环境的双手臂搬运机器人主要有双臂独立驱动伸缩型机器人和双臂公用驱动伸缩型机器人。前者的每组手臂的伸缩各需要1 个驱动器，每组手臂的回转公用1 个驱动器，故共需3 个驱动器，后者的两组手臂的伸缩公用1 个驱动器，公用1 个回转驱动器，共需2 个驱动器。Kensington Laboratories 申请的专利US5765444（图4.15）公布了一种双臂独立驱动伸缩的手臂机构。日本Daikin 公司的专利US5857826（图4.16）采用一种双臂伸缩共用一个驱动的机器人，其手臂部分在高度上分为两层，即大臂和小臂。公用驱动连杆和辅助连杆位于大臂和小臂之间。为了给公用驱动连杆和辅助连杆的运动留空间，大臂和小臂的部分厚度必须减薄，导致大小臂的刚度降低。Hosek Martin 申请的专利WO2008124108（图4.17）提出采用Watt 六杆机构实现两组SCARA（Selective Compliance Assembly Robot Arm，选择顺应性装配机器手臂）手臂的伸缩控制，其等腰三角形的公用驱动连杆与SCARA 手臂的大臂转轴有明显的重叠区域。为避免运动干涉，公用驱动连杆和辅助连杆只能安装在SCARA 手臂大臂上方，为节省空间，通常要求公用驱动连杆和辅助连杆的厚度不超过小臂的厚度，导致刚度降低。

1.Kensington Laboratories 申请的美国专利（数据来源：欧洲专利局）

Dual end effector， multiple link robot arm system with corner reacharound and extended reach capabilities -Abstract of US5765444

图4.15　US5765444 摘要附图

A multiple link robot arm system has straight line motion, extended reach,corner reacharound, and continuous bidirectional rotation capabilities for transporting specimens to virtually any location in an available work space that is free of lockout spaces. Each of two embodiments includes two end effectors or hands. A first embodiment comprises two multiple link robot arm mechanisms mounted on a torso link that is capable of 360 degree rotation about a central axis. Each robot arm mechanism includes an end effector having a single hand. A second embodiment has only one of the robot arm mechanisms and has an end effector with two oppositely extending hands. Each robot arm mechanism uses two motors capable of synchronized operation to permit movement of the robot arm hand along a curvilinear path as the extension of the hand changes. A third motor rotates the torso link about the central axis and permits rotation of the torso link independent of the motion of the robot arm mechanism or mechanisms mounted to it. The presence of the rotatable torso link together with the independent robot arm motion provides a high speed, high throughput robot arm system that operates in a compact work space.

2.日本Daikin 公司的美国专利（数据来源：欧洲专利局）

Work transporting robot and semiconductor device manufacturing apparatus -Abstract of US5857826

图4.16　US5857826 摘要附图

A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane,the plane being parallel to one another, a pair of first coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of one of the first and third arms, a first work supporting table which is connected to the other end of the pair of first coupled arms, a pair of second coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of the other of the first and third arms, and a second work supporting table which is connected to the other end of the pair of second coupled arms, and wherein the first and third arms are disposed in the same side to one another with respect to a plane which includes the axis and the second arm.(www.xing528.com)

3.Hosek Martin 申请的美国专利（数据来源：欧洲专利局）

Substrate transport apparatus with multiple independently movable articulated arms-Abstract of WO2008124108

图4.17　WO2008124108 摘要附图

A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.

沈阳新松机器人自动化股份有限公司于2010 年11 月30 日向中国国家知识产权局提交了名为“平面多关节型机器人手臂机构”的发明专利申请。该申请于2014 年6 月18 日获得专利授权，授权公告号为CN102476383B。该专利在2019 年被授予第一届辽宁省专利奖二等奖。该授权专利公开了一种平面多关节型机器人手臂机构。表4.3 所示为CN102476383B 专利附加信息。图4.18 所示为该授权专利的摘要附图。

表4.3　CN102476383B 专利附加信息

图4.18　CN102476383B 摘要附图

该专利公开了一种平面多关节型机器人手臂机构，属于工业机器人技术领域，包括驱动单元、基座平台和双伸缩臂组件，所述驱动单元具有至少一个旋转轴——旋转轴内轴，内置旋转轴内轴的基座平台连接在驱动单元的升降机构上，双伸缩臂组件分别通过旋转关节相对于驱动单元的旋转轴线对称安装在基座平台上，旋转轴内轴与双伸缩臂组件的公用驱动连杆固接，所述升降机构的升降轴和旋转轴内轴分别通过电机与驱动单元的控制器连接。本发明采用七杆并联机构，既可实现双SCARA 双臂组件的回转动作，又可实现伸缩动作；驱动单元内的升降机构，实现双SCARA 双臂组件的升降运动，满足结构简单紧凑、刚度高，运动灵活可靠，重复定位精度高和可靠性高的要求。

该专利权利要求1 记载的内容：一种平面多关节型机器人手臂机构，包括驱动单元、基座平台和双伸缩臂组件，其特征在于：所述驱动单元具有相互套装的两个旋转轴——旋转轴内轴和旋转轴外轴，内置两旋转轴的基座平台连接在驱动单元的升降机构上，双伸缩臂组件分别通过旋转关节相对于驱动单元的旋转轴线对称安装在基座平台上的旋转轴外轴上，旋转轴内轴与双伸缩臂组件的公用驱动连杆固接，所述升降机构的升降轴通过第一电机与驱动单元的控制器连接，所述旋转轴外轴通过第二电机与驱动单元的控制器连接，所述旋转轴内轴通过第三电机与驱动单元的控制器连接；驱动所述旋转轴内轴的第三电机安装在旋转轴外轴上。

新松公司致力于机器人等相关技术的研发，曾多次在国内外机器人相关的赛事获奖，在研发阶段投入较高的研发经费，对现有市场和潜在市场的影响力较大。本专利涉及的一种平面多关节型机器人手臂机构，机器人手臂机构的研究一直是工业机器人方面的前沿领域，该领域的技术突破将对行业提供启示。然而，新松公司专利的海外布局也应进一步加强，以期在国际市场占据优势地位。